Stations for characterization and determination of physicochemical parameters of developed and manufactured photonic and microelectronic sensor structures (25)

Silesian University of Technology

Contact person :

Marcin Procek

The stations include infrastructure for technology, characterization and determination of basic physicochemical parameters of low-dimensional sensor structures – photonic and microelectronic. The apparatus enables in situ research and characterization of structures exposed to variable environmental factors, such as the impact of variable concentrations of a specific gas analyte, variable temperature, humidity and UV radiation. The laboratory includes a number of metrological techniques, i.e. AFM, ellipsometry, Raman spectroscopy, etc., enabling the study of the morphology of structures, optical parameters, electrical properties, etc.

Elements included in the station:

EDS system for chemical microanalysis of sensor materials in SEM measurements;
WLI Contour x-100 optical profilometer for the analysis of sensor structures;
Parametric analyzer of semiconductor structures;
Microinjectors for microdrop application of sensor materials from the liquid phase;
Infrastructure of the technological and research space for the preparation of sensor structures.

Pricing (netto):

Basic research in the field of determining the physicochemical mechanisms responsible for the operation of sensors: from PLN 1500 net/hour
Nano- and micro-identification of low-dimensional structures: from PLN 1000 net/hour
Testing the influence of the chemical composition on the physicochemical properties of structures: from PLN 800 net/hour
Qualitative and quantitative tests of the degree of degradation/poisoning of the sensor structure, etc.: from PLN 1000 net/hour